Inventor
CHAU KIET A
US2 patents
Patents
2 patentsUS10670960B2Jun 2, 2020
Enhanced high aspect ratio etch performance using accelerated neutral beams derived from gas-cluster ion beams
EXOGENESIS CORP4 citations64
US11735432B2Aug 22, 2023
Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam
EXOGENESIS CORP0 citations54