Inventor

EBERLE ANNA LENA

DE2 patents

Patents

2 patents

US11069508B2Jul 20, 2021

Method of imaging a 3D sample with a multi-beam particle microscope

CARL ZEISS MULTISEM GMBH4 citations67

US11521827B2Dec 6, 2022

Method of imaging a 2D sample with a multi-beam particle microscope

CARL ZEISS MULTISEM GMBH0 citations57