Inventor
KATAOKA Mizuki
JP2 patents
Patents
2 patentsUS11237472B2Feb 1, 2022
Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method
HOYA CORP0 citations58
US11892768B2Feb 6, 2024
Reflective mask blank, reflective mask and method of manufacturing the same, and method of manufacturing semiconductor device
HOYA CORP0 citations43