Inventor

HENNHOEFER HEINRICH

DE2 patents

Patents

2 patents

US5980361ANov 9, 1999

Method and device for polishing semiconductor wafers

WACKER SILTRONIC HALBLEITERMAT54 citations92

US6530826B2Mar 11, 2003

Process for the surface polishing of silicon wafers

WACKER SILTRONIC HALBLEITERMAT35 citations90