Inventor

DEKKERS-ROG PETRA ALBERTINA MA

NL2 patents

Patents

2 patents

US7265364B2Sep 4, 2007

Level sensor for lithographic apparatus

ASML NETHERLANDS BV278 citations94

US6955074B2Oct 18, 2005

Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV7 citations71