Inventor

CAPODILUPO RONALD A

US2 patents

Patents

2 patents

US6204508B1Mar 20, 2001

Toroidal filament for plasma generation

AXCELIS TECH INC11 citations65

US7423277B2Sep 9, 2008

Ion beam monitoring in an ion implanter using an imaging device

AXCELIS TECH INC5 citations56