Inventor

XIAO FU-YUAN

TW2 patents

Patents

2 patents

US7435612B2Oct 14, 2008

CMOS-MEMS process

NAT APPLIED RES LAB NAT CHIP I13 citations79

US7435663B2Oct 14, 2008

Methods for dicing a released CMOS-MEMS multi-project wafer

NAT APPLIED RES LAB NAT CHIP I3 citations57