Inventor
DOBSON MATTHEW PETER
GB3 patents
Patents
3 patentsUS6818909B2Nov 16, 2004
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC38 citations89
US6686601B2Feb 3, 2004
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC24 citations89
US7611975B2Nov 3, 2009
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC5 citations61