Inventor

FELNHOFER DANIEL

US2 patents

Patents

2 patents

US7978395B2Jul 12, 2011

Capacitive MEMS device with programmable offset voltage control

QUALCOMM MEMS TECHNOLOGIES INC7 citations80

US7729036B2Jun 1, 2010

Capacitive MEMS device with programmable offset voltage control

QUALCOMM MEMS TECHNOLOGIES INC9 citations80