Inventor
NISKANEN ANTTI J
FI8 patents
Patents
8 patentsUS10395917B2Aug 27, 2019
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV405 citations99
US10424477B2Sep 24, 2019
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV298 citations98
US9824881B2Nov 21, 2017
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV304 citations98
US9905416B2Feb 27, 2018
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV19 citations94
US9564309B2Feb 7, 2017
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV29 citations94
US11289327B2Mar 29, 2022
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV1 citations73
US11069522B2Jul 20, 2021
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV3 citations73
US11587783B2Feb 21, 2023
Si precursors for deposition of SiN at low temperatures
ASM IP HOLDING BV0 citations62