Inventor
WU MING-SUNG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “WU MING-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS9857689B2Jan 2, 2018
Method for fabricating pattern using supporting assembly with rolling member disposed below supporting rods and semiconductor fabrication apparatus having the supporting assembly
UNITED MICROELECTRONICS CORP3 citations68
US6166392ADec 26, 2000
Exposure for performing synchronized off-axis alignment
UNITED MICROELECTRONICS CORP8 citations67
US9400431B2Jul 26, 2016
Supporting assembly with a rolling ball disposed directly below supporting rods and method for using the same
UNITED MICROELECTRONICS CORP2 citations57