Inventor
YAMAZAKI HIROHISA
JP26 patents
⚠️ This page may combine multiple inventors who share the name “YAMAZAKI HIROHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
10 patentsUS6686281B2Feb 3, 2004
Method for fabricating a semiconductor device and a substrate processing apparatus
HITACHI INT ELECTRIC INC383 citations99
US10297440B2May 21, 2019
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC345 citations98
US11293096B2Apr 5, 2022
Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer
HITACHI INT ELECTRIC INC8 citations85
US10707074B2Jul 7, 2020
Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations82
US9401282B2Jul 26, 2016
Method of manufacturing semiconductor device, cleaning method, substrate processing apparatus and non-transitory computer readable recording medium
HITACHI INT ELECTRIC INC3 citations73
US7662727B2Feb 16, 2010
Method for manufacturing semiconductor device background
HITACHI INT ELECTRIC INC2 citations62
US9768012B2Sep 19, 2017
Method for processing substrate and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations52
US9206931B2Dec 8, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
US8741731B2Jun 3, 2014
Method of manufacturing a semiconductor device
HITACHI INT ELECTRIC INC1 citations52
US8641829B2Feb 4, 2014
Substrate processing system
HITACHI INT ELECTRIC INC1 citations49
KOKUSAI ELECTRIC CORP
8 patentsUS11542603B2Jan 3, 2023
Substrate processing apparatus, method of manufacturing semiconductor device and substrate processing method
KOKUSAI ELECTRIC CORP2 citations73
US12473648B2Nov 18, 2025
Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations62
US12234550B2Feb 25, 2025
Vaporizer, processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US11970771B2Apr 30, 2024
Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US11873555B2Jan 16, 2024
Vaporizer, substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US10910217B2Feb 2, 2021
Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations61
US12354887B2Jul 8, 2025
Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations52
US11866822B2Jan 9, 2024
Vaporizer, substrate processing apparatus, and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations47
SAKAI MASANORI
3 patentsUS8828141B2Sep 9, 2014
Substrate processing apparatus and method for manufacturing semiconductor device
SAKAI MASANORI11 citations83
US8461062B2Jun 11, 2013
Substrate processing apparatus and method for manufacturing semiconductor device
SAKAI MASANORI10 citations83
US8598047B2Dec 3, 2013
Substrate processing apparatus and producing method of semiconductor device
SAKAI MASANORI0 citations41