Inventor
SUN JONG-WOO
KR21 patents
Patents
21 patentsUS10395900B2Aug 27, 2019
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD7 citations82
US7629589B2Dec 8, 2009
Apparatus and method for controlling ion beam
SAMSUNG ELECTRONICS CO LTD7 citations73
US11037766B2Jun 15, 2021
Substrate support apparatus and plasma processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US11501987B2Nov 15, 2022
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US10971382B2Apr 6, 2021
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations71
US10790122B2Sep 29, 2020
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10964578B2Mar 30, 2021
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US10903053B2Jan 26, 2021
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations61
US11837496B2Dec 5, 2023
Substrate processing apparatus and method of processing a substrate
SAMSUNG ELECTRONICS CO LTD0 citations60
US11521866B2Dec 6, 2022
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11437222B2Sep 6, 2022
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11037806B2Jun 15, 2021
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11018046B2May 25, 2021
Substrate processing apparatus including edge ring
SAMSUNG ELECTRONICS CO LTD1 citations60
US10753800B2Aug 25, 2020
Calibrator of an optical emission spectroscopy
SAMSUNG ELECTRONICS CO LTD1 citations59
US11437264B2Sep 6, 2022
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US11282678B2Mar 22, 2022
Method of controlling uniformity of plasma and plasma processing system
SAMSUNG ELECTRONICS CO LTD0 citations53
US10748749B1Aug 18, 2020
Plasma monitoring apparatus, and plasma processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations53
US11289309B2Mar 29, 2022
Device for providing gas to a plasma chamber and a plasma processing device including the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10062550B2Aug 28, 2018
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations49
US11521836B2Dec 6, 2022
Plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US10825666B2Nov 3, 2020
Plasma monitoring apparatus and plasma processing system
SAMSUNG ELECTRONICS CO LTD0 citations47