Inventor
GU JA-MYUNG
KR7 patents
⚠️ This page may combine multiple inventors who share the name “GU JA-MYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
6 patentsUS12051565B2Jul 30, 2024
Substrate treating apparatus and impedance matching method
SEMES CO LTD2 citations67
US11437220B2Sep 6, 2022
Plasma processing apparatus and method of operating the same
SEMES CO LTD0 citations49
US12276684B2Apr 15, 2025
Method and apparatus for determining cable length for plasma processing equipment
SEMES CO LTD0 citations46
US11869749B2Jan 9, 2024
Substrate processing apparatus and method of manufacturing thereof
SEMES CO LTD0 citations45
US12087547B2Sep 10, 2024
Device for multi-level pulsing, substrate processing apparatus including the same
SEMES CO LTD0 citations44
US12125682B2Oct 22, 2024
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations43