Inventor
AN JONG-HWAN
KR13 patents
⚠️ This page may combine multiple inventors who share the name “AN JONG-HWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
12 patentsUS11823874B2Nov 21, 2023
Substrate treating apparatus and method for controlling temperature of ferrite core
SEMES CO LTD2 citations70
US11545340B2Jan 3, 2023
Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same
SEMES CO LTD4 citations69
US10867775B2Dec 15, 2020
Apparatus and method for treating substrate
SEMES CO LTD4 citations66
US12456606B2Oct 28, 2025
Support unit and apparatus for treating substrate
SEMES CO LTD0 citations58
US10600618B2Mar 24, 2020
Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus
SEMES CO LTD1 citations58
US11587770B2Feb 21, 2023
Apparatus and method for treating substrate
SEMES CO LTD1 citations53
US11195705B2Dec 7, 2021
Plasma generating unit and substrate treating apparatus comprising the same
SEMES CO LTD0 citations50
US12249491B2Mar 11, 2025
Substrate treating apparatus and substrate support unit
SEMES CO LTD0 citations47
US11244847B2Feb 8, 2022
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations47
US11869749B2Jan 9, 2024
Substrate processing apparatus and method of manufacturing thereof
SEMES CO LTD0 citations45
US12125678B2Oct 22, 2024
Filter unit, substrate treating apparatus including the same, and substrate treating method
SEMES CO LTD0 citations42
US10319566B2Jun 11, 2019
Apparatus for supplying power and apparatus for treating substrate including the same
SEMES CO LTD0 citations37