Inventor

KUO MING-SHIOU

TW7 patents

⚠️ This page may combine multiple inventors who share the name “KUO MING-SHIOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US10190209B2Jan 29, 2019

PVD apparatus and method with deposition chamber having multiple targets and magnets

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71

US10043892B2Aug 7, 2018

Method for manufacturing a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48

KAO CHUNG-EN

2 patents

US8953298B2Feb 10, 2015

Electrostatic chuck robotic system

KAO CHUNG-EN2 citations58

US9708706B2Jul 18, 2017

PVD apparatus and method with deposition chamber having multiple targets and magnets

KAO CHUNG-EN1 citations47

CHANG JEN-CHI

1 patent

US9716044B2Jul 25, 2017

Interlayer dielectric structure with high aspect ratio process (HARP)

CHANG JEN-CHI6 citations68

CHANG HUNG JUI

1 patent

US8624394B2Jan 7, 2014

Integrated technology for partial air gap low K deposition

CHANG HUNG JUI2 citations53

KUO MING-SHIOU

1 patent

US8916480B2Dec 23, 2014

Chemical vapor deposition film profile uniformity control

KUO MING-SHIOU0 citations44