Inventor
MATSUURA SHIN
JP20 patents
⚠️ This page may combine multiple inventors who share the name “MATSUURA SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUS11901163B2Feb 13, 2024
Plasma processing system and edge ring replacement method
TOKYO ELECTRON LTD2 citations72
US10910251B2Feb 2, 2021
Pin control method and substrate processing apparatus
TOKYO ELECTRON LTD3 citations72
US10777435B2Sep 15, 2020
Substratre delivery method and substrate processing apparatus
TOKYO ELECTRON LTD3 citations72
US10438834B2Oct 8, 2019
Pin control method
TOKYO ELECTRON LTD3 citations72
US12394605B2Aug 19, 2025
Plasma processing system and edge ring replacement method
TOKYO ELECTRON LTD0 citations62
US10811234B2Oct 20, 2020
Plasma processing apparatus and upper electrode assembly
TOKYO ELECTRON LTD1 citations61
US12469738B2Nov 11, 2025
Substrate support, plasma processing apparatus, and ring replacement method
TOKYO ELECTRON LTD0 citations60
US12374533B2Jul 29, 2025
Plasma processing system and method of mounting annular member
TOKYO ELECTRON LTD0 citations51
US12068139B2Aug 20, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US11152196B2Oct 19, 2021
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9941101B2Apr 10, 2018
Plasma processing apparatus and upper electrode assembly
TOKYO ELECTRON LTD1 citations51
US12165893B2Dec 10, 2024
Substrate processing system and transfer method
TOKYO ELECTRON LTD0 citations50
US12027346B2Jul 2, 2024
Substrate processing apparatus and method of driving relay member
TOKYO ELECTRON LTD0 citations50
US12165854B2Dec 10, 2024
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46
US9773647B2Sep 26, 2017
Plasma processing apparatus and upper electrode assembly
TOKYO ELECTRON LTD1 citations45
US12531213B2Jan 20, 2026
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations44
US10866017B2Dec 15, 2020
Condensation suppressing method and processing apparatus
TOKYO ELECTRON LTD0 citations39