Inventor
YU LIN-CHIEN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YU LIN-CHIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patentsUS6662066B1Dec 9, 2003
Dynamic adjustment and auto generation of water per hour (WPH) in capacity check system (CCS) by tool performance tracking platform (TP2)
TAIWAN SEMICONDUCTOR MFG29 citations83
US6862555B2Mar 1, 2005
Enhanced preventative maintenance system and method of use
TAIWAN SEMICONDUCTOR MFG8 citations64