P

Inventor

CADEE THEODORUS PETRUS MARIA

NL40 patents
⚠️ This page may combine multiple inventors who share the name “CADEE THEODORUS PETRUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

24 patents
US7304715B2Dec 4, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US7078715B2Jul 18, 2006

Lithographic apparatus and apparatus adjustment method

ASML NETHERLANDS BV24 citations91
US9618859B2Apr 11, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations73
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US9726985B2Aug 8, 2017

Stage system and a lithographic apparatus

ASML NETHERLANDS BV4 citations71
US9983482B2May 29, 2018

Radiation collector, radiation source and lithographic apparatus

ASML NETHERLANDS BV2 citations70
US7180571B2Feb 20, 2007

Lithographic projection apparatus and actuator

ASML NETHERLANDS BV5 citations63
US8368868B2Feb 5, 2013

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

ASML NETHERLANDS BV2 citations62
US7696492B2Apr 13, 2010

Radiation system and lithographic apparatus

ASML NETHERLANDS BV6 citations61
US7342237B2Mar 11, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations56
US9696640B2Jul 4, 2017

Lithographic apparatus

ASML NETHERLANDS BV1 citations52
US9684249B2Jun 20, 2017

Lithographic apparatus with a metrology system for measuring a position of a substrate table

ASML NETHERLANDS BV1 citations52
US9470969B2Oct 18, 2016

Support, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US10254663B2Apr 9, 2019

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV0 citations51
US9811005B2Nov 7, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations51
US9261798B2Feb 16, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations51
US9921494B2Mar 20, 2018

Lithographic apparatus comprising an actuator, and method for protecting such actuator

ASML NETHERLANDS BV0 citations50
US9494869B2Nov 15, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations50
US9410796B2Aug 9, 2016

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations41
US9195150B2Nov 24, 2015

Lithographic apparatus comprising a support for holding an object, and a support for use therein

ASML NETHERLANDS BV0 citations41
US10061213B2Aug 28, 2018

Sensor, object positioning system, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations36
US10095128B2Oct 9, 2018

Thermal conditioning method

ASML NETHERLANDS BV0 citations32

CADEE THEODORUS PETRUS MARIA

7 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82
US8810777B2Aug 19, 2014

Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system

CADEE THEODORUS PETRUS MARIA8 citations81
US8616598B2Dec 31, 2013

Apparatus and method for contactless handling of an object

CADEE THEODORUS PETRUS MARIA6 citations65
US8830441B2Sep 9, 2014

Fluid handling structure, a lithographic apparatus and a device manufacturing method

CADEE THEODORUS PETRUS MARIA0 citations51
US8597014B2Dec 3, 2013

Actuator

CADEE THEODORUS PETRUS MARIA0 citations51
US8947636B2Feb 3, 2015

Lithographic apparatus, device manufacturing method, and substrate exchanging method

CADEE THEODORUS PETRUS MARIA0 citations41

DEN BOEF ARIE JEFFREY

1 patent
US8593646B2Nov 26, 2013

Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method

DEN BOEF ARIE JEFFREY30 citations92

BEERENS RUUD ANTONIUS CATHARINA MARIA

1 patent
US8976335B2Mar 10, 2015

Lithographic apparatus and removable member

BEERENS RUUD ANTONIUS CATHARINA MARIA9 citations82

HUANG YANG-SHAN

1 patent
US9329501B2May 3, 2016

Lithographic apparatus, method of deforming a substrate table and device manufacturing method

HUANG YANG-SHAN2 citations56

WIJCKMANS MAURICE

1 patent
US8913228B2Dec 16, 2014

Lithographic apparatus and device manufacturing method

WIJCKMANS MAURICE2 citations54

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

1 patent
US8932042B2Jan 13, 2015

Lithographic apparatus and device manufacturing method

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS1 citations49

GILISSEN NOUD JAN

1 patent
US8411247B2Apr 2, 2013

Lithographic apparatus and positioning apparatus

GILISSEN NOUD JAN0 citations45

AKKERMANS JOHANNES ANTONIUS GERARDUS

1 patent
US8587769B2Nov 19, 2013

Stage apparatus and lithographic apparatus comprising such stage apparatus

AKKERMANS JOHANNES ANTONIUS GERARDUS0 citations40

BLEEKER ARNO JAN

1 patent
US9513561B2Dec 6, 2016

Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method

BLEEKER ARNO JAN0 citations36

HOL SVEN ANTOIN JOHAN

1 patent
US8472010B2Jun 25, 2013

Actuator, positioning system and lithographic apparatus

HOL SVEN ANTOIN JOHAN0 citations35