Inventor
DE MOL CHRISTIANUS GERARDUS MARIA
NL16 patents
⚠️ This page may combine multiple inventors who share the name “DE MOL CHRISTIANUS GERARDUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7649614B2Jan 19, 2010
Method of characterization, method of characterizing a process operation, and device manufacturing method
ASML NETHERLANDS BV11 citations83
US10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US7916275B2Mar 29, 2011
Methods of characterizing similarity or consistency in a set of entities
ASML NETHERLANDS BV9 citations82
US9594029B2Mar 14, 2017
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations81
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US7889318B2Feb 15, 2011
Methods of characterizing similarity between measurements on entities, computer programs product and data carrier
ASML NETHERLANDS BV3 citations61
US7480028B2Jan 20, 2009
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program
ASML NETHERLANDS BV3 citations58
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51