P

Inventor

MUITJENS MARCEL JOHANNUS ELISABETH HUBERTUS

NL9 patents
⚠️ This page may combine multiple inventors who share the name “MUITJENS MARCEL JOHANNUS ELISABETH HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US9606445B2Mar 28, 2017

Lithographic apparatus and method of manufacturing a device

ASML NETHERLANDS BV5 citations68
US10254663B2Apr 9, 2019

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV0 citations51
US10268128B2Apr 23, 2019

Lithographic apparatus

ASML NETHERLANDS BV0 citations32

CADEE THEODORUS PETRUS MARIA

2 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS

1 patent
US9176398B2Nov 3, 2015

Method and system for thermally conditioning an optical element

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS1 citations36