P

Inventor

VAN DER NET ANTONIUS JOHANNUS

NL26 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER NET ANTONIUS JOHANNUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

15 patents
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US7379155B2May 27, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV28 citations90
US9436097B2Sep 6, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations84
US7866637B2Jan 11, 2011

Humidifying apparatus, lithographic apparatus and humidifying method

ASML NETHERLANDS BV8 citations84
US10248033B2Apr 2, 2019

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations73
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US9753380B2Sep 5, 2017

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations62
US8004652B2Aug 23, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations62
US7924404B2Apr 12, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations62
US9599908B2Mar 21, 2017

Lithographic apparatus and contamination removal or prevention method

ASML NETHERLANDS BV1 citations60
US7916269B2Mar 29, 2011

Lithographic apparatus and contamination removal or prevention method

ASML NETHERLANDS BV3 citations60
US10254663B2Apr 9, 2019

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV0 citations51
US12572078B2Mar 10, 2026

Radiation source module and lithographic apparatus

ASML NETHERLANDS BV0 citations44
US12411424B2Sep 9, 2025

Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object

ASML NETHERLANDS BV0 citations44

CADEE THEODORUS PETRUS MARIA

2 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82

VAN DER NET ANTONIUS JOHANNUS

2 patents
US9004459B2Apr 14, 2015

Humidifying apparatus, lithographic apparatus and humidifying method

VAN DER NET ANTONIUS JOHANNUS0 citations47
US8885142B2Nov 11, 2014

Lithographic apparatus and device manufacturing method

VAN DER NET ANTONIUS JOHANNUS0 citations47

MERTENS JEROEN JOHANNES SOPHIA MARIA

1 patent
US8934082B2Jan 13, 2015

Lithographic apparatus and device manufacturing method

MERTENS JEROEN JOHANNES SOPHIA MARIA5 citations82

VAN BOXTEL FRANK JOHANNES JACOBUS

1 patent
US9811007B2Nov 7, 2017

Lithographic apparatus and method of cooling a component in a lithographic apparatus

VAN BOXTEL FRANK JOHANNES JACOBUS2 citations67

HOEKERD KORNELIS TIJMEN

1 patent
US8432531B2Apr 30, 2013

Lithographic apparatus and a method of operating the apparatus

HOEKERD KORNELIS TIJMEN6 citations65

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS

1 patent
US9158206B2Oct 13, 2015

Lithographic apparatus and contamination removal or prevention method

DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS1 citations59

KRAMER PIETER JACOB

1 patent
US8446561B2May 21, 2013

Lithographic apparatus and a method of measuring flow rate in a two phase flow

KRAMER PIETER JACOB2 citations55

GOSEN JEROEN GERARD

1 patent
US8810769B2Aug 19, 2014

Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus

GOSEN JEROEN GERARD0 citations47

JANSEN BAUKE

1 patent
US8564757B2Oct 22, 2013

Lithographic apparatus and a method of operating the apparatus

JANSEN BAUKE0 citations32