Inventor
QUAEDACKERS JOHANNES ANNA
NL26 patents
⚠️ This page may combine multiple inventors who share the name “QUAEDACKERS JOHANNES ANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7992115B2Aug 2, 2011
Overlay measurement on double patterning substrate
ASML NETHERLANDS BV12 citations77
US7596420B2Sep 29, 2009
Device manufacturing method and computer program product
ASML NETHERLANDS BV7 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US9436099B2Sep 6, 2016
Lithographic focus and dose measurement using a 2-D target
ASML NETHERLANDS BV5 citations71
US7670731B2Mar 2, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV7 citations69
US7307687B2Dec 11, 2007
Lithographic apparatus, device manufacturing method and substrate
ASML NETHERLANDS BV2 citations57
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
US7382438B2Jun 3, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41
MITUTOYO CORP
8 patentsUS9881400B2Jan 30, 2018
Method for measuring a high accuracy height map of a test surface
MITUTOYO CORP9 citations76
US10636157B2Apr 28, 2020
Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system
MITUTOYO CORP1 citations62
US10302415B2May 28, 2019
Method for calculating a height map of a body of transparent material having an inclined or curved surface
MITUTOYO CORP1 citations62
US10794688B2Oct 6, 2020
Optical interference measuring device
MITUTOYO CORP1 citations59
US10563974B2Feb 18, 2020
Method for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift
MITUTOYO CORP1 citations59
US9103651B2Aug 11, 2015
Method and apparatus for determining a property of a surface
MITUTOYO CORP3 citations59
US11466976B2Oct 11, 2022
Method and system for measuring a height map of a surface of an object, and computer program therefor
MITUTOYO CORP0 citations51
US10024648B2Jul 17, 2018
Interference measuring device and method of measurement using the same device
MITUTOYO CORP0 citations49