Inventor
REUHMAN-HUISKEN MARIA ELISABETH
NL7 patents
⚠️ This page may combine multiple inventors who share the name “REUHMAN-HUISKEN MARIA ELISABETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7916275B2Mar 29, 2011
Methods of characterizing similarity or consistency in a set of entities
ASML NETHERLANDS BV9 citations82
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US7889318B2Feb 15, 2011
Methods of characterizing similarity between measurements on entities, computer programs product and data carrier
ASML NETHERLANDS BV3 citations61
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51