Inventor
VERSPAY JACOBUS JOHANNUS LEONARDUS HENDRICUS
NL36 patents
⚠️ This page may combine multiple inventors who share the name “VERSPAY JACOBUS JOHANNUS LEONARDUS HENDRICUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
29 patentsUS9360765B2Jun 7, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations93
US9097987B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7932999B2Apr 26, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US9454088B2Sep 27, 2016
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV4 citations84
US9436097B2Sep 6, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10248033B2Apr 2, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9772565B2Sep 26, 2017
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US11170907B2Nov 9, 2021
Radioisotope production
ASML NETHERLANDS BV4 citations71
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7914687B2Mar 29, 2011
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US9753380B2Sep 5, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US9164391B2Oct 20, 2015
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations62
US8004652B2Aug 23, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7764356B2Jul 27, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US10712675B2Jul 14, 2020
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV0 citations52
US10620546B2Apr 14, 2020
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US10274832B2Apr 30, 2019
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9964861B2May 8, 2018
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9885965B2Feb 6, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9798247B2Oct 24, 2017
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US9645507B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9588442B2Mar 7, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9261797B2Feb 16, 2016
Lithographic apparatus and device manufacturing method involving a liquid confinement structure
ASML NETHERLANDS BV0 citations52
US8045137B2Oct 25, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51