Inventor
DE JONG FREDERIK EDUARD
NL21 patents
⚠️ This page may combine multiple inventors who share the name “DE JONG FREDERIK EDUARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7462429B2Dec 9, 2008
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate
ASML NETHERLANDS BV9 citations84
US7196768B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7710539B2May 4, 2010
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device
ASML NETHERLANDS BV5 citations73
US7462430B2Dec 9, 2008
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device
ASML NETHERLANDS BV4 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US7746447B2Jun 29, 2010
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus
ASML NETHERLANDS BV2 citations63
US7710538B2May 4, 2010
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate
ASML NETHERLANDS BV2 citations62
US7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
US8384881B2Feb 26, 2013
Lithographic apparatus, stage apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41