Inventor
GOORMAN KOEN
NL12 patents
⚠️ This page may combine multiple inventors who share the name “GOORMAN KOEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7196768B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7453063B2Nov 18, 2008
Calibration substrate and method for calibrating a lithographic apparatus
ASML NETHERLANDS BV16 citations82
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51