Inventor
BOOM HERMAN
NL22 patents
⚠️ This page may combine multiple inventors who share the name “BOOM HERMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US7808614B2Oct 5, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations72
US7969549B2Jun 28, 2011
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
ASML NETHERLANDS BV4 citations61
US7522261B2Apr 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7843552B2Nov 30, 2010
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
ASML NETHERLANDS BV5 citations60
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51