Inventor
NIHTIANOV STOYAN
NL20 patents
⚠️ This page may combine multiple inventors who share the name “NIHTIANOV STOYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS7586108B2Sep 8, 2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
ASML NETHERLANDS BV56 citations94
US7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7190437B2Mar 13, 2007
Wireless signaling in a lithographic apparatus
ASML NETHERLANDS BV12 citations82
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US10678147B2Jun 9, 2020
Measurement systems, lithographic apparatus, device manufacturing method and a method of measuring
ASML NETHERLANDS BV2 citations72
US7148494B2Dec 12, 2006
Level sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations72
US9331117B2May 3, 2016
Sensor and lithographic apparatus
ASML NETHERLANDS BV6 citations71
US7170583B2Jan 30, 2007
Lithographic apparatus immersion damage control
ASML NETHERLANDS BV8 citations68
US10508896B2Dec 17, 2019
Measurement substrate and a measurement method
ASML NETHERLANDS BV1 citations59
US7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US12342635B2Jun 24, 2025
Semiconductor detector and method of fabricating same
ASML NETHERLANDS BV0 citations54
US11843069B2Dec 12, 2023
Semiconductor detector and method of fabricating same
ASML NETHERLANDS BV0 citations54
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
US7321416B2Jan 22, 2008
Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion
ASML NETHERLANDS BV1 citations46
NIHTIANOV STOYAN
2 patentsUS8138485B2Mar 20, 2012
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN35 citations86
US8426831B2Apr 23, 2013
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN6 citations78