P

Inventor

SMEETS MARTIN FRANS PIERRE

NL10 patents
⚠️ This page may combine multiple inventors who share the name “SMEETS MARTIN FRANS PIERRE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents
US7304715B2Dec 4, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010

Lithographic apparatus and device manufacturing method having liquid evaporation control

ASML NETHERLANDS BV23 citations92
US11378893B2Jul 5, 2022

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV1 citations72
US10254663B2Apr 9, 2019

Lithographic apparatus and device manufacturing method involving a heater

ASML NETHERLANDS BV0 citations51

CADEE THEODORUS PETRUS MARIA

2 patents
US9268242B2Feb 23, 2016

Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor

CADEE THEODORUS PETRUS MARIA4 citations82
US9188880B2Nov 17, 2015

Lithographic apparatus and device manufacturing method involving a heater

CADEE THEODORUS PETRUS MARIA4 citations82

COMPEN RENE THEODORUS PETRUS

1 patent
US9013682B2Apr 21, 2015

Clamping device and object loading method

COMPEN RENE THEODORUS PETRUS5 citations71

WIJCKMANS MAURICE

1 patent
US8913228B2Dec 16, 2014

Lithographic apparatus and device manufacturing method

WIJCKMANS MAURICE2 citations54

MOORS JOHANNES HUBERTUS JOSEPHINA

1 patent
US8446560B2May 21, 2013

Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method

MOORS JOHANNES HUBERTUS JOSEPHINA0 citations48