Inventor
JANSSEN FRANCISCUS JOHANNES JOSEPH
NL47 patents
⚠️ This page may combine multiple inventors who share the name “JANSSEN FRANCISCUS JOHANNES JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
24 patentsUS7652746B2Jan 26, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US9454088B2Sep 27, 2016
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV4 citations84
US10416574B2Sep 17, 2019
Lithographic apparatus
ASML NETHERLANDS BV5 citations82
US7751027B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations82
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US9772565B2Sep 26, 2017
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations73
US7928407B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US9625835B2Apr 18, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations69
US9164391B2Oct 20, 2015
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV2 citations62
US10935895B2Mar 2, 2021
Lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11163240B2Nov 2, 2021
Heating system for an optical component of a lithographic apparatus
ASML NETHERLANDS BV0 citations52
US10712675B2Jul 14, 2020
Immersion liquid, exposure apparatus, and exposure process
ASML NETHERLANDS BV0 citations52
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
US10088755B2Oct 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9715179B2Jul 25, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9823590B2Nov 21, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US10268128B2Apr 23, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations32
US10877384B1Dec 29, 2020
Radiation shielding device and apparatus comprising such shielding device
ASML NETHERLANDS BV0 citations30
NIENHUYS HAN-KWANG
3 patentsUS8730448B2May 20, 2014
Lithographic apparatus and device manufacturing method
NIENHUYS HAN-KWANG9 citations80
US8970818B2Mar 3, 2015
Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient
NIENHUYS HAN-KWANG5 citations68
US8797504B2Aug 5, 2014
Lithographic apparatus and device manufacturing method
NIENHUYS HAN-KWANG1 citations48
JANSEN HANS
3 patentsUS8859188B2Oct 14, 2014
Immersion liquid, exposure apparatus, and exposure process
JANSEN HANS2 citations62
US8138486B2Mar 20, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS2 citations62
US8481978B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
JANSEN HANS0 citations51