Inventor
ELLIS RAYMOND
US6 patents
⚠️ This page may combine multiple inventors who share the name “ELLIS RAYMOND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
3 patentsUS10468290B2Nov 5, 2019
Wafer chuck apparatus with micro-channel regions
ULTRATECH INC1 citations53
US10269662B2Apr 23, 2019
Scanning methods for focus control for lithographic processing of reconstituted wafers
ULTRATECH INC1 citations50
US9436103B2Sep 6, 2016
Wynne-Dyson projection lens with reduced susceptibility to UV damage
ULTRATECH INC1 citations47