Inventor
HARIHARAN VENKAT
US5 patents
Patents
5 patentsUS10384330B2Aug 20, 2019
Polishing pads produced by an additive manufacturing process
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US10919123B2Feb 16, 2021
Piezo-electric end-pointing for 3D printed CMP pads
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US10875145B2Dec 29, 2020
Polishing pads produced by an additive manufacturing process
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US10821573B2Nov 3, 2020
Polishing pads produced by an additive manufacturing process
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US11685014B2Jun 27, 2023
Formulations for advanced polishing pads
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