Inventor
OCHS STEFAN
DE19 patents
⚠️ This page may combine multiple inventors who share the name “OCHS STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERAEUS QUARZGLAS
12 patentsUS7080527B2Jul 25, 2006
Quartz glass blank for an optical component, and manufacturing procedure and use thereof
HERAEUS QUARZGLAS2 citations61
US7082790B2Aug 1, 2006
Quartz glass blank for an optical component, and manufacturing procedure and use thereof
HERAEUS QUARZGLAS4 citations56
US9586850B2Mar 7, 2017
Method for producing titanium-doped silica glass for use in EUV lithography and blank produced in accordance therewith
HERAEUS QUARZGLAS1 citations51
US9522840B2Dec 20, 2016
Blank of TiO2-SiO2 glass for a mirror substrate for use in EUV lithography and method for the production thereof
HERAEUS QUARZGLAS0 citations51
US7954341B2Jun 7, 2011
Method for making a blank from material, particularly for an optical component for use in microlithography
HERAEUS QUARZGLAS0 citations51
US7691766B2Apr 6, 2010
Material, particularly for an optical component for use in microlithography, and method for making a blank from the material
HERAEUS QUARZGLAS0 citations51
US11952302B2Apr 9, 2024
Process for the preparation of fluorinated quartz glass
HERAEUS QUARZGLAS0 citations50
US11884571B2Jan 30, 2024
Alternative fluorinating agents for the production of fluorinated quartz glass
HERAEUS QUARZGLAS0 citations50
US10807901B2Oct 20, 2020
Method for producing an optical blank from synthetic quartz glass
HERAEUS QUARZGLAS0 citations45
US9568818B2Feb 14, 2017
Method for producing a blank of fluorine-doped and titanium-doped glass having a high silicic-acid content and a blank produced according to the method
HERAEUS QUARZGLAS0 citations41
US9540271B2Jan 10, 2017
Blank made of titanium-doped silica glass and method for the production thereof
HERAEUS QUARZGLAS0 citations41
US9593034B2Mar 14, 2017
Method for producing iron-doped silica glass
HERAEUS QUARZGLAS0 citations40