Inventor
KAO SHENG-CHING
TW3 patents
Patents
3 patentsUS12119273B2Oct 15, 2024
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US11749571B2Sep 5, 2023
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US12326397B2Jun 10, 2025
In-situ apparatus for detecting abnormality in process tube
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48