Inventor
MIZUNO YASUSHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS7388649B2Jun 17, 2008
Exposure apparatus and method for producing device
NIKON CORP121 citations99
US6975387B2Dec 13, 2005
Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device
NIKON CORP24 citations92
US8760617B2Jun 24, 2014
Exposure apparatus and method for producing device
NIKON CORP4 citations84
US7667829B2Feb 23, 2010
Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method
NIKON CORP8 citations82
US8384877B2Feb 26, 2013
Exposure apparatus and method for producing device
NIKON CORP4 citations74
US12493240B2Dec 9, 2025
Exposure apparatus, method for manufacturing device, method for manufacturing flat panel display, and exposure method
NIKON CORP0 citations62
US12248253B2Mar 11, 2025
Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
NIKON CORP0 citations62
US11899372B2Feb 13, 2024
Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
NIKON CORP1 citations62
US10025194B2Jul 17, 2018
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US9513558B2Dec 6, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US8749759B2Jun 10, 2014
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US7889320B2Feb 15, 2011
Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
NIKON CORP5 citations59
US12578651B2Mar 17, 2026
Exposure apparatus, exposure method, and flat panel display manufacturing method
NIKON CORP0 citations52
US12585195B2Mar 24, 2026
Pattern exposure apparatus, device manufacturing method, and exposure apparatus
NIKON CORP0 citations46
KOBAYASHI NAOYUKI
5 patentsUS8174668B2May 8, 2012
Exposure apparatus and method for producing device
KOBAYASHI NAOYUKI11 citations92
US8169592B2May 1, 2012
Exposure apparatus and method for producing device
KOBAYASHI NAOYUKI4 citations74
US8130363B2Mar 6, 2012
Exposure apparatus and method for producing device
KOBAYASHI NAOYUKI4 citations74
US8125612B2Feb 28, 2012
Exposure apparatus and method for producing device
KOBAYASHI NAOYUKI4 citations74
US8072576B2Dec 6, 2011
Exposure apparatus and method for producing device
KOBAYASHI NAOYUKI4 citations74