Inventor
NAKASHIMA TOSHIHARU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “NAKASHIMA TOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
8 patentsUS5534970AJul 9, 1996
Scanning exposure apparatus
NIKON CORP200 citations98
US7102731B2Sep 5, 2006
Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method
NIKON CORP23 citations92
US7088426B2Aug 8, 2006
Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method
NIKON CORP40 citations92
US6208406B1Mar 27, 2001
Environmental control apparatus for exposure apparatus
NIKON CORP17 citations91
US5976738ANov 2, 1999
Exposure and alignment method
NIKON CORP26 citations91
US6281965B1Aug 28, 2001
Exposure method and exposure system using the exposure method
NIKON CORP13 citations72
US6710846B2Mar 23, 2004
Environmental control apparatus for exposure apparatus
NIKON CORP1 citations51
US12585195B2Mar 24, 2026
Pattern exposure apparatus, device manufacturing method, and exposure apparatus
NIKON CORP0 citations46