Inventor
BAEK DONGSEOK
KR4 patents
Patents
4 patentsUS10217653B2Feb 26, 2019
Apparatus for treating substrate
SAMSUNG ELECTRONICS CO LTD2 citations69
US11923214B2Mar 5, 2024
Semiconductor packaging apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US11062924B2Jul 13, 2021
Semiconductor packaging apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10665483B2May 26, 2020
Apparatus for treating a substrate
SAMSUNG ELECTRONICS CO LTD0 citations35