Inventor
MA CHING-HUI
TW3 patents
Patents
3 patentsUS6914007B2Jul 5, 2005
In-situ discharge to avoid arcing during plasma etch processes
TAIWAN SEMICONDUCTOR MFG11 citations71
US6727183B1Apr 27, 2004
Prevention of spiking in ultra low dielectric constant material
TAIWAN SEMICONDUCTOR MFG2 citations60
US6884728B2Apr 26, 2005
Method for removing polymeric residue contamination on semiconductor feature sidewalls
TAIWAN SEMICONDUCTOR MFG4 citations59