Inventor
OKITA SHOGO
JP68 patents
⚠️ This page may combine multiple inventors who share the name “OKITA SHOGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC IP MAN CO LTD
43 patentsUS12230484B2Feb 18, 2025
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD2 citations75
US11289428B2Mar 29, 2022
Element chip manufacturing method
PANASONIC IP MAN CO LTD3 citations73
US10923357B2Feb 16, 2021
Element chip and manufacturing process thereof
PANASONIC IP MAN CO LTD5 citations73
US10763124B2Sep 1, 2020
Manufacturing process of element chip
PANASONIC IP MAN CO LTD2 citations73
US10217617B2Feb 26, 2019
Plasma processing apparatus and method therefor
PANASONIC IP MAN CO LTD2 citations73
US9953906B2Apr 24, 2018
Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure
PANASONIC IP MAN CO LTD2 citations73
US9859144B2Jan 2, 2018
Method of manufacturing element chip
PANASONIC IP MAN CO LTD2 citations73
US9780021B2Oct 3, 2017
Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure
PANASONIC IP MAN CO LTD2 citations73
US9620336B2Apr 11, 2017
Plasma processing apparatus and method therefor
PANASONIC IP MAN CO LTD3 citations73
US9502220B2Nov 22, 2016
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD3 citations73
US12205823B2Jan 21, 2025
Method for producing element chips
PANASONIC IP MAN CO LTD2 citations72
US12165845B2Dec 10, 2024
Plasma processing apparatus and method for using plasma processing apparatus
PANASONIC IP MAN CO LTD4 citations72
US11830758B2Nov 28, 2023
Plasma processing method
PANASONIC IP MAN CO LTD0 citations62
US11551974B2Jan 10, 2023
Manufacturing process of element chip using laser grooving and plasma-etching
PANASONIC IP MAN CO LTD0 citations62
US11355323B2Jun 7, 2022
Plasma processing apparatus and method therefor
PANASONIC IP MAN CO LTD0 citations62
US11189480B2Nov 30, 2021
Element chip manufacturing method
PANASONIC IP MAN CO LTD1 citations62
US11145548B2Oct 12, 2021
Manufacturing process of element chip using laser grooving and plasma-etching
PANASONIC IP MAN CO LTD0 citations62
US10964597B2Mar 30, 2021
Element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations62
US10923362B2Feb 16, 2021
Manufacturing process of element chip
PANASONIC IP MAN CO LTD0 citations62
US10892190B2Jan 12, 2021
Manufacturing process of element chip
PANASONIC IP MAN CO LTD1 citations62
US10497622B2Dec 3, 2019
Element chip manufacturing method
PANASONIC IP MAN CO LTD1 citations62
US10361111B2Jul 23, 2019
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD1 citations59
US12340976B2Jun 24, 2025
Plasma processing apparatus
PANASONIC IP MAN CO LTD0 citations56
US12500076B2Dec 16, 2025
Cleaning method of electronic component and manufacturing method of element chip
PANASONIC IP MAN CO LTD0 citations52
US12300482B2May 13, 2025
Element chip manufacturing method and substrate processing method
PANASONIC IP MAN CO LTD0 citations52
US11817323B2Nov 14, 2023
Etching method and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations52
US11682575B2Jun 20, 2023
Plasma processing apparatus, plasma processing method, and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations52
US11361944B2Jun 14, 2022
Plasma processing method, and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations52
US11101112B2Aug 24, 2021
Plasma processing device and plasma processing method
PANASONIC IP MAN CO LTD0 citations52
US10714356B2Jul 14, 2020
Plasma processing method
PANASONIC IP MAN CO LTD0 citations52
US10424488B2Sep 24, 2019
Method of manufacturing electronic component
PANASONIC IP MAN CO LTD0 citations52
US10037891B2Jul 31, 2018
Manufacturing method of element chip
PANASONIC IP MAN CO LTD1 citations52
US10026619B2Jul 17, 2018
Plasma treatment method
PANASONIC IP MAN CO LTD0 citations52
US9911638B2Mar 6, 2018
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD1 citations52
US9698052B2Jul 4, 2017
Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chip
PANASONIC IP MAN CO LTD1 citations52
US9570272B2Feb 14, 2017
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD1 citations52
US11688641B2Jun 27, 2023
Element chip isolation method using laser grooving and plasma etching
PANASONIC IP MAN CO LTD0 citations51
US11398372B2Jul 26, 2022
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD0 citations51
US10896849B2Jan 19, 2021
Method of dicing a semiconductor wafer using a protective film formed by coating a mixture of water-soluble resin and organic solvent
PANASONIC IP MAN CO LTD0 citations51
US9922899B2Mar 20, 2018
Method of manufacturing element chip and element chip
PANASONIC IP MAN CO LTD1 citations51
US12230541B2Feb 18, 2025
Element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
US11335564B2May 17, 2022
Element chip smoothing method and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
US11219929B2Jan 11, 2022
Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
OKITA SHOGO
6 patentsUS8673166B2Mar 18, 2014
Plasma processing apparatus and plasma processing method
OKITA SHOGO17 citations82
US8231798B2Jul 31, 2012
Plasma processing apparatus and plasma processing method
OKITA SHOGO7 citations82
US8303765B2Nov 6, 2012
Plasma etching apparatus
OKITA SHOGO9 citations79
US8883025B2Nov 11, 2014
Plasma processing apparatus and plasma processing method
OKITA SHOGO4 citations72
US8591754B2Nov 26, 2013
Plasma processing apparatus and plasma processing method
OKITA SHOGO1 citations60
US9073385B2Jul 7, 2015
Plasma processing method for substrates
OKITA SHOGO2 citations59
PANASONIC CORP
1 patentShowing the top 50 of 68 patents by PatentIndex Score.