Inventor

MARTIN AIDEN

AU3 patents

Patents

3 patents

US9123506B2Sep 1, 2015

Electron beam-induced etching

FEI CO3 citations58

US10304658B2May 28, 2019

Electron beam-induced etching

FEI CO0 citations48

US9799490B2Oct 24, 2017

Charged particle beam processing using process gas and cooled surface

FEI CO1 citations43