Inventor
CHADHA ARVINDER MANMOHAN SINGH
US7 patents
Patents
7 patentsUS12512358B2Dec 30, 2025
Electrostatically secured substrate support assembly
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US12492926B2Dec 9, 2025
Packaging for a sensor and methods of manufacturing thereof
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US12424481B2Sep 23, 2025
Modular substrate support assembly
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US12482692B2Nov 25, 2025
Efficient dechucking and particle management in process chambers
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US12537464B2Jan 27, 2026
Substrate support assembly with dieletric cooling plate
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US12542260B2Feb 3, 2026
Surface topologies of electrostatic substrate support for particle reduction
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US12583211B2Mar 24, 2026
Substrate support assembly with multiple discs
APPLIED MATERIALS INC0 citations50