Inventor

ARITA TOMOKAZU

US3 patents

Patents

3 patents

US10020216B1Jul 10, 2018

Robot diagnosing method

KAWASAKI HEAVY IND LTD4 citations70

US11031269B2Jun 8, 2021

Substrate transport robot, substrate transport system, and substrate transport method

KAWASAKI HEAVY IND LTD1 citations57

US11207775B2Dec 28, 2021

Method of teaching robot

KAWASAKI HEAVY IND LTD0 citations48