Inventor
NAKAHARA HAJIME
US17 patents
Patents
17 patentsUS9796086B2Oct 24, 2017
Method of teaching robot and robot
KAWASAKI HEAVY IND LTD8 citations82
US10549427B1Feb 4, 2020
Substrate transfer robot
KAWASAKI HEAVY IND LTD3 citations73
US10974388B2Apr 13, 2021
Method of correcting position of robot and robot
KAWASAKI HEAVY IND LTD2 citations72
US11335578B2May 17, 2022
Substrate transfer apparatus and method of measuring positional deviation of substrate
KAWASAKI HEAVY IND LTD2 citations71
US11328947B1May 10, 2022
Aligner apparatus and alignment method
KAWASAKI HEAVY IND LTD3 citations70
US10020216B1Jul 10, 2018
Robot diagnosing method
KAWASAKI HEAVY IND LTD4 citations70
US10953539B2Mar 23, 2021
Substrate transfer robot and automatic teaching method
KAWASAKI HEAVY IND LTD4 citations69
US11554498B2Jan 17, 2023
Wafer jig, robot system, communication method, and robot teaching method
KAWASAKI HEAVY IND LTD0 citations62
US11315823B2Apr 26, 2022
Substrate suction-holding structure and substrate transfer robot
KAWASAKI HEAVY IND LTD1 citations62
US11059178B2Jul 13, 2021
Method of correcting position of robot and robot
KAWASAKI HEAVY IND LTD1 citations62
US11926039B2Mar 12, 2024
Robot
KAWASAKI HEAVY IND LTD0 citations61
US11845179B2Dec 19, 2023
Wafer jig, robot system, communication method, and robot teaching method
KAWASAKI HEAVY IND LTD0 citations61
US12334387B2Jun 17, 2025
Substrate transfer apparatus
KAWASAKI HEAVY IND LTD0 citations51
US10014205B2Jul 3, 2018
Substrate conveyance robot and operating method thereof
KAWASAKI HEAVY IND LTD1 citations49
US11207775B2Dec 28, 2021
Method of teaching robot
KAWASAKI HEAVY IND LTD0 citations48
US11654578B2May 23, 2023
Robot system and offset acquisition method
KAWASAKI HEAVY IND LTD0 citations46
US10403539B2Sep 3, 2019
Robot diagnosing method
KAWASAKI HEAVY IND LTD0 citations33