Inventor
BHARWANI Avish Ashok
US14 patents
Patents
14 patentsUS10391640B1Aug 27, 2019
Robot
KAWASAKI HEAVY IND LTD3 citations72
US11335578B2May 17, 2022
Substrate transfer apparatus and method of measuring positional deviation of substrate
KAWASAKI HEAVY IND LTD2 citations71
US10020216B1Jul 10, 2018
Robot diagnosing method
KAWASAKI HEAVY IND LTD4 citations70
US11427412B2Aug 30, 2022
Substrate conveying robot and substrate conveying method
KAWASAKI HEAVY IND LTD2 citations69
US11926039B2Mar 12, 2024
Robot
KAWASAKI HEAVY IND LTD0 citations61
US11862507B2Jan 2, 2024
Robot system, and slip determination method
KAWASAKI HEAVY IND LTD1 citations60
US12148646B2Nov 19, 2024
Aligner apparatus
KAWASAKI HEAVY IND LTD0 citations59
US12002695B2Jun 4, 2024
Transport system and determination method
KAWASAKI HEAVY IND LTD1 citations59
US12046501B2Jul 23, 2024
Substrate handling apparatus and method of handling substrate
KAWASAKI HEAVY IND LTD1 citations56
US10636693B2Apr 28, 2020
Substrate transfer device and control method therefor
KAWASAKI HEAVY IND LTD0 citations51
US12216451B2Feb 4, 2025
Robot system
KAWASAKI HEAVY IND LTD0 citations50
US10014205B2Jul 3, 2018
Substrate conveyance robot and operating method thereof
KAWASAKI HEAVY IND LTD1 citations49
US12162145B2Dec 10, 2024
Substrate conveying robot and substrate conveying robot system
KAWASAKI HEAVY IND LTD0 citations48
US11207775B2Dec 28, 2021
Method of teaching robot
KAWASAKI HEAVY IND LTD0 citations48