Inventor
GEISLER MICHAEL
DE21 patents
⚠️ This page may combine multiple inventors who share the name “GEISLER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD AG
13 patentsUS5399254AMar 21, 1995
Apparatus for plasma treatment
LEYBOLD AG71 citations96
US4987346AJan 22, 1991
Particle source for a reactive ion beam etching or plasma deposition installation
LEYBOLD AG66 citations94
US5113790AMay 19, 1992
Apparatus for the plasma treatment of substrates
LEYBOLD AG109 citations93
US5006219AApr 9, 1991
Microwave cathode sputtering arrangement
LEYBOLD AG32 citations92
US5378284AJan 3, 1995
Apparatus for coating substrates using a microwave ECR plasma source
LEYBOLD AG40 citations91
US5173640ADec 22, 1992
Apparatus for the production of a regular microwave field
LEYBOLD AG31 citations91
US5102523AApr 7, 1992
Arrangement for the production of a plasma
LEYBOLD AG102 citations91
US5053244AOct 1, 1991
Process for depositing silicon oxide on a substrate
LEYBOLD AG25 citations90
US5294464AMar 15, 1994
Method for producing a reflective surface on a substrate
LEYBOLD AG49 citations87
US4939424AJul 3, 1990
Apparatus for producing a plasma and for the treatment of substrates
LEYBOLD AG21 citations80
US5259603ANov 9, 1993
Device for mounting and transporting substrates in vacuum apparatus
LEYBOLD AG13 citations74
US5283538AFeb 1, 1994
Apparatus for coupling microwave power out of a first space into a second space
LEYBOLD AG3 citations61
US5118549AJun 2, 1992
Optical recording medium
LEYBOLD AG1 citations49