Inventor
WESSLIN JOHANNES
FI7 patents
Patents
7 patentsUS11926896B2Mar 12, 2024
Atomic layer deposition apparatus
BENEQ OY0 citations60
US12180588B2Dec 31, 2024
Loading device, arrangement and method for loading a reaction chamber
BENEQ OY0 citations50
US12180587B2Dec 31, 2024
Vacuum chamber and arrangement for atomic layer deposition
BENEQ OY0 citations50
US12116668B2Oct 15, 2024
Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement
BENEQ OY0 citations50
US12104248B2Oct 1, 2024
Gas feeding cup and a gas manifold assembly
BENEQ OY0 citations50
US12590367B2Mar 31, 2026
Precursor supply chamber
BENEQ OY0 citations46
US11549702B2Jan 10, 2023
Precursor supply cabinet
BENEQ OY0 citations46