Inventor

MALILA MATTI

FI4 patents

Patents

4 patents

US11371146B2Jun 28, 2022

Gas distribution unit in connection with ALD reactor

BENEQ OY0 citations52

US11970773B2Apr 30, 2024

Apparatus and method for atomic layer deposition (ALD)

BENEQ OY0 citations47

US12590367B2Mar 31, 2026

Precursor supply chamber

BENEQ OY0 citations46

US11549702B2Jan 10, 2023

Precursor supply cabinet

BENEQ OY0 citations46