Inventor
SOININEN PEKKA
FI37 patents
⚠️ This page may combine multiple inventors who share the name “SOININEN PEKKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BENEQ OY
21 patentsUS9708710B2Jul 18, 2017
Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors
BENEQ OY3 citations69
US7922821B2Apr 12, 2011
Source, an arrangement for installing a source, and a method for installing and removing a source
BENEQ OY2 citations62
US11926896B2Mar 12, 2024
Atomic layer deposition apparatus
BENEQ OY0 citations60
US12180588B2Dec 31, 2024
Loading device, arrangement and method for loading a reaction chamber
BENEQ OY0 citations50
US12180587B2Dec 31, 2024
Vacuum chamber and arrangement for atomic layer deposition
BENEQ OY0 citations50
US12116668B2Oct 15, 2024
Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement
BENEQ OY0 citations50
US12104248B2Oct 1, 2024
Gas feeding cup and a gas manifold assembly
BENEQ OY0 citations50
US12460292B2Nov 4, 2025
Atomic layer deposition apparatus and a method
BENEQ OY0 citations48
US11702745B2Jul 18, 2023
Nozzle and nozzle head
BENEQ OY0 citations48
US11214866B2Jan 4, 2022
Nozzle head and apparatus
BENEQ OY0 citations48
US10023957B2Jul 17, 2018
Apparatus and method for processing substrate
BENEQ OY1 citations48
US11970773B2Apr 30, 2024
Apparatus and method for atomic layer deposition (ALD)
BENEQ OY0 citations47
US12590367B2Mar 31, 2026
Precursor supply chamber
BENEQ OY0 citations46
US11549702B2Jan 10, 2023
Precursor supply cabinet
BENEQ OY0 citations46
US12442081B2Oct 14, 2025
Nozzle head and apparatus
BENEQ OY0 citations45
US12000043B2Jun 4, 2024
Precursor source arrangement and atomic layer deposition apparatus
BENEQ OY0 citations45
US11634814B2Apr 25, 2023
Atomic layer deposition apparatus
BENEQ OY0 citations45
US10590536B2Mar 17, 2020
Apparatus, method and reaction chamber
BENEQ OY0 citations45
US9683291B2Jun 20, 2017
Apparatus for processing surface of substrate and nozzle head
BENEQ OY1 citations45
US10280508B2May 7, 2019
Nozzle head and apparatus for coating substrate surface
BENEQ OY0 citations38
US10385450B2Aug 20, 2019
Method of coating a substrate and an apparatus
BENEQ OY0 citations30
NOKIA CORP
3 patentsUS6625138B2Sep 23, 2003
Data transmission method and a radio system
NOKIA CORP48 citations95
US6594248B1Jul 15, 2003
Data transmission method and a radio system
NOKIA CORP51 citations95
US7215658B2May 8, 2007
Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network
NOKIA CORP26 citations92