Inventor
KADLEC STANISLAV
CZ18 patents
⚠️ This page may combine multiple inventors who share the name “KADLEC STANISLAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KADLEC STANISLAV
5 patentsUS9355824B2May 31, 2016
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)
KADLEC STANISLAV17 citations89
US8574409B2Nov 5, 2013
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
KADLEC STANISLAV18 citations89
US8435389B2May 7, 2013
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
KADLEC STANISLAV7 citations82
US9611537B2Apr 4, 2017
Target shaping
KADLEC STANISLAV2 citations70
US8246794B2Aug 21, 2012
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
KADLEC STANISLAV1 citations49
OC OERLIKON BALZERS AG
4 patentsUS10692707B2Jun 23, 2020
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
OC OERLIKON BALZERS AG3 citations72
US7138343B2Nov 21, 2006
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
OC OERLIKON BALZERS AG7 citations69
US7718042B2May 18, 2010
Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source
OC OERLIKON BALZERS AG4 citations62
US7429543B2Sep 30, 2008
Method for the production of a substrate
OC OERLIKON BALZERS AG0 citations48